diff --git a/components/esp_driver_touch_sens/common/touch_sens_common.c b/components/esp_driver_touch_sens/common/touch_sens_common.c
index 4a3a57f640..19450a568b 100644
--- a/components/esp_driver_touch_sens/common/touch_sens_common.c
+++ b/components/esp_driver_touch_sens/common/touch_sens_common.c
@@ -90,6 +90,9 @@ esp_err_t touch_sensor_new_controller(const touch_sensor_config_t *sens_cfg, tou
     ESP_GOTO_ON_FALSE(g_touch->mutex, ESP_ERR_NO_MEM, err, TAG, "No memory for mutex semaphore");
 
     touch_priv_enable_module(true);
+#if SOC_TOUCH_SENSOR_VERSION >= 2
+    touch_ll_reset_module();
+#endif
     ESP_GOTO_ON_ERROR(touch_priv_config_controller(g_touch, sens_cfg), err, TAG, "Failed to configure the touch controller");
 #if SOC_TOUCH_SENSOR_VERSION <= 2
     ESP_GOTO_ON_ERROR(rtc_isr_register(touch_priv_default_intr_handler, NULL, TOUCH_LL_INTR_MASK_ALL, 0), err, TAG, "Failed to register interrupt handler");
diff --git a/components/hal/esp32/touch_sensor_hal.c b/components/hal/esp32/touch_sensor_hal.c
index d74a6686dd..1f41066483 100644
--- a/components/hal/esp32/touch_sensor_hal.c
+++ b/components/hal/esp32/touch_sensor_hal.c
@@ -1,5 +1,5 @@
 /*
- * SPDX-FileCopyrightText: 2015-2022 Espressif Systems (Shanghai) CO LTD
+ * SPDX-FileCopyrightText: 2015-2026 Espressif Systems (Shanghai) CO LTD
  *
  * SPDX-License-Identifier: Apache-2.0
  */
@@ -11,14 +11,13 @@
 
 void touch_hal_init(void)
 {
-    touch_ll_stop_fsm();
-    touch_ll_intr_disable();
+    // Deinit to reset the registers in case of the registers are not reset when wakeup from deep sleep.
+    touch_hal_deinit();
     touch_ll_intr_clear();
     touch_ll_clear_channel_mask(TOUCH_PAD_BIT_MASK_ALL);
     touch_ll_clear_group_mask(TOUCH_PAD_BIT_MASK_ALL, TOUCH_PAD_BIT_MASK_ALL);
     touch_ll_set_trigger_mode(TOUCH_TRIGGER_MODE_DEFAULT);
     touch_ll_set_trigger_source(TOUCH_TRIGGER_SOURCE_DEFAULT);
-    touch_ll_clear_trigger_status_mask();
     touch_ll_set_meas_time(TOUCH_PAD_MEASURE_CYCLE_DEFAULT);
     touch_ll_set_sleep_time(TOUCH_PAD_SLEEP_CYCLE_DEFAULT);
     touch_ll_set_fsm_mode(TOUCH_FSM_MODE_DEFAULT);
diff --git a/components/hal/esp32s2/touch_sensor_hal.c b/components/hal/esp32s2/touch_sensor_hal.c
index 78bc17819e..4d3d7f8135 100644
--- a/components/hal/esp32s2/touch_sensor_hal.c
+++ b/components/hal/esp32s2/touch_sensor_hal.c
@@ -1,5 +1,5 @@
 /*
- * SPDX-FileCopyrightText: 2015-2024 Espressif Systems (Shanghai) CO LTD
+ * SPDX-FileCopyrightText: 2015-2026 Espressif Systems (Shanghai) CO LTD
  *
  * SPDX-License-Identifier: Apache-2.0
  */
@@ -16,11 +16,10 @@ static int s_meas_times = -1;
 
 void touch_hal_init(void)
 {
+    // Deinit to reset the registers in case of the registers are not reset when wakeup from deep sleep.
+    touch_hal_deinit();
     touch_ll_stop_fsm();
-    touch_ll_intr_disable(TOUCH_PAD_INTR_MASK_ALL);
     touch_ll_intr_clear(TOUCH_PAD_INTR_MASK_ALL);
-    touch_ll_clear_channel_mask(TOUCH_PAD_BIT_MASK_ALL);
-    touch_ll_clear_trigger_status_mask();
     touch_ll_set_meas_times(TOUCH_PAD_MEASURE_CYCLE_DEFAULT);
     touch_ll_set_sleep_time(TOUCH_PAD_SLEEP_CYCLE_DEFAULT);
     /* Configure the touch-sensor power domain into self-bias since bandgap-bias
@@ -47,6 +46,7 @@ void touch_hal_deinit(void)
     touch_ll_clear_channel_mask(TOUCH_PAD_BIT_MASK_ALL);
     touch_ll_clear_trigger_status_mask();
     touch_ll_intr_disable(TOUCH_PAD_INTR_MASK_ALL);
+    touch_ll_intr_clear(TOUCH_PAD_INTR_MASK_ALL);
     touch_ll_timeout_disable();
     touch_ll_waterproof_disable();
     touch_ll_denoise_disable();
diff --git a/components/hal/esp32s3/touch_sensor_hal.c b/components/hal/esp32s3/touch_sensor_hal.c
index 83dcc05cd5..bb0f48b71d 100644
--- a/components/hal/esp32s3/touch_sensor_hal.c
+++ b/components/hal/esp32s3/touch_sensor_hal.c
@@ -1,5 +1,5 @@
 /*
- * SPDX-FileCopyrightText: 2015-2024 Espressif Systems (Shanghai) CO LTD
+ * SPDX-FileCopyrightText: 2015-2026 Espressif Systems (Shanghai) CO LTD
  *
  * SPDX-License-Identifier: Apache-2.0
  */
@@ -16,11 +16,9 @@ static int s_meas_times = -1;
 
 void touch_hal_init(void)
 {
+    // Deinit to reset the registers in case of the registers are not reset when wakeup from deep sleep.
+    touch_hal_deinit();
     touch_ll_stop_fsm();
-    touch_ll_intr_disable(TOUCH_PAD_INTR_MASK_ALL);
-    touch_ll_intr_clear(TOUCH_PAD_INTR_MASK_ALL);
-    touch_ll_clear_channel_mask(TOUCH_PAD_BIT_MASK_ALL);
-    touch_ll_clear_trigger_status_mask();
     touch_ll_set_meas_times(TOUCH_PAD_MEASURE_CYCLE_DEFAULT);
     touch_ll_set_sleep_time(TOUCH_PAD_SLEEP_CYCLE_DEFAULT);
     /* Configure the touch-sensor power domain into self-bias since bandgap-bias
@@ -47,6 +45,7 @@ void touch_hal_deinit(void)
     touch_ll_clear_channel_mask(TOUCH_PAD_BIT_MASK_ALL);
     touch_ll_clear_trigger_status_mask();
     touch_ll_intr_disable(TOUCH_PAD_INTR_MASK_ALL);
+    touch_ll_intr_clear(TOUCH_PAD_INTR_MASK_ALL);
     touch_ll_timeout_disable();
     touch_ll_waterproof_disable();
     touch_ll_denoise_disable();